SIOS Nanopositioning and Nanomeasuring

SIOS NPP-1 Nanopositioning Platform: Planar laser interferometric measurement and positioning system for AFM

The SIOS NPP-1 nanomeasurement and positioning platform allows positioning in a range of about 100 mm. The high resolution of the laser interferometers used for control, the rigid architecture of the positioning system, the air-bearing axes of the positioning system and an optimized control system allow the position deviations and path fidelity of the movements < 2 nm RMS.
SIOS NMM-1 Nanopositioning and Nanomeasuring Machine: Positioning, manipulation, processing and measurement of objects and structures with nanometer accuracy

The SIOS NMM-1 nanopositioning and nanomeasuring machine for three-dimensional coordinate measurement operates in a measuring range of 25 mm x 25 mm x 5 mm with a resolution of 0.1 nm. A special sensor arrangement ensures a measurement free of aberrations in all three coordinate axes. The measuring axes of three miniature interferometers intersect virtually at the point of contact between the probing sensor and the measured object.