Today’s technological developments follow a common trend in many industrial sectors: products are becoming more complex, more powerful and larger, with components and object structures becoming smaller and more compact. This statement also applies to display manufacturing technology – one of the main applications for the differential interferometer SP 5000 DI developed by SIOS.
Length and Angle Measurement Systems
Two parallel measuring beams are used to acquire two length values independently of each other. So it is possible to determine the position, angle and difference values simultaneously.
Many applications in industry and research require high-precision simultaneous displacement and angle measurements. Fast set-up and easy adjustment are particularly important.