The SIOS NMM-1 nanopositioning and nanomeasuring machine for three-dimensional coordinate measurement operates in a measuring range of 25 mm x 25 mm x 5 mm with a resolution of 0.1 nm. A special sensor arrangement ensures a measurement free of aberrations in all three coordinate axes. The measuring axes of three miniature interferometers intersect virtually at the point of contact between the probing sensor and the measured object.