The general ongoing trend towards precision, miniaturization and automation in industry and research places high demands on precision measurement systems, which are expected to detect the geometrical dimensions of objects.
Hereby, the highly precise one-dimensional measurement of the thickness of precision objects is a special application. Specifically designed setups based on interferometric tactile probes are able to detect the thickness with measurement uncertainties in the 10 nm range. Examples are gauge block comparators or setups for the measurement of precision optics or silicon wafers thickness.
Image: Simplified illustration of a wafer thickness measurement with two LM 20 laser interferometric probes (Photo wafer: I’m Thongcha – stock.adobe.com)
In this approx. 45 min webinar from SIOS, you will gain insight into issues around the high precision measurement of the thickness of extended objects using tactile probes.
Starting with the discussion of typical influences and contributions to the measurement uncertainty, we compare different principles of equipment for this tactile length measurements.
We introduce the SIOS interferometrical tactile probes LM 20 and LM 50 and discuss their benefits compared to other high precision probes.
Furthermore, application examples of high precision thickness measurements such as the SIOS gauge block comparator, the lens- or wafer-thickness measurement setups are discussed.
Finally, we present examples how existing (tactile) length and thickness measurement setups can be upgraded with interferometers to increase their resolution and precision.
Outline:
- Geometrical definition of thickness
- Principles for tactile thickness measurement
- Influences and contributions to the measurement uncertainty
- SIOS interferometrical tactile probes LM 20 and LM 50
- Application example gauge block comparator
- Application example lens thickness measurement setup
- Application example wafer thickness measurement setup
- Upgrade of existing length and thickness measurement setup with interferometers
Our speakers will be pleased to answer your questions after the presentation.
REGISTER NOW for the webinar in English by clicking on links below:
First Session:
March 08, 2022 // 8:30 am Berlin time
06:30 PM - 07:30 PM Melbourne/Sydney time
Second Session:
March 08, 2022 // 3:30 pm Berlin time
Wednesday, March 9, 2022
01:30 AM - 02:30 AM