Semiconductor manufacturers design chips with structures down to 4nm. This requires positioning systems with the highest level of precision in terms of minimal deviation, high resolution and fast step-settle times. For inspection tools it is critical to focus on specific points as repeatable and as accurate as possible, with nearly a 0% failure rate.
The piezosystem jena MIPOS series is the solution to position objective lenses and other optical devices to focus precisely and scan with sub-nano - meter resolution in Z-direction. Due to its stiffness of up to 4N/µm it can move in Z-direction with minimal deviation in X and Y. Travel range span can be up to 600µm. The MIPOS is available in openloop configuration, which is optimal for high speed motion and scanning applications. In applications where accuracy is critical, closed-loop systems can be used to eliminate non-linear behavior. This allows high repeatability and long-term positioning stability. MIPOS systems are guided by flexure-hinges that are optimized using finite element analysis to ensure high stiffness and reliability. The resulting design offers outstanding resonance frequencies of up to 950 Hz and hence rise time in the ms range. Closed-loop sys - tems can be built with strain gauge and capacitive sensors, depending on customer resolution requirements, operating temperature expectations and the space allotted.
- Sub nm resolution
- Low lateral run-out in x and y
- Highly repeatable, accurate z motion
- Settling times in ms
- High linear motion
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