ThruSight-Focus is ALIO’s ultra-precise, open-center XYZ stage, featuring a novel Z-wedge drive for backlash-free motion and ±50nm repeatability. Its open center and compact vertical profile enables top-and-bottom access, ideal for advanced imaging in Life Science, micromachining in laser processing, as well as probing and assembly for semiconductor and micro-electronics applications.
- Travel 118 x 64 x 5 mm
- Accuracy +/- 0.7 um
- Bi-Directional Repeatability Down to +/- 50nm
What is ThruSight-Focus?
ThruSight-Focus is ALIO’s next-generation open-center XYZ Cartesian stage, built to deliver unmatched precision, flexibility, and accessibility for advanced imaging and processing tasks. At its core is a novel Z-wedge mechanism that converts horizontal force into vertical motion via direct drive actuation. This innovative approach eliminates backlash, improves servo bandwidth, and enables fast move-and-settle performance while maintaining a compact, low-profile architecture. Combined with ALIO’s proven open-center XY stage technology — featuring direct linear drives, crossed roller bearings, and Nano Precision® positioning — ThruSight-Focus achieves bi-directional repeatability as tight as ±50nm for travel of 118 mm in X, 64 mm in Y, and 5 mm in Z.
What truly sets ThruSight-Focus apart is its fully open center architecture, enabling imaging or processing from above and below. This is essential for applications requiring backside access, such as laser micromachining, wafer-level packaging, and advanced microscopy. The stage’s compact footprint also addresses critical space constraints in labs, cleanrooms, and OEM systems. Designed to simplify integration and enhance throughput, ThruSight-Focus reduces mechanical complexity while boosting performance, making it ideal for customers in Life Sciences, Semiconductors, and Photonics.