Intelligent design gives the Eitzenberger EZ-0730 High Precision Impulse Decoupled Stage maximum rigidity and excellent repeatability, minimizing axis crosstalk.
Built-in features:
- Impulse decoupling to minimize crosstalk even at high accelerations.
- Weight optimization by using carbon for the lower slide.
- Use of carbon structures with thermal expansion close to 0 to minimize harmful temperature effects.
- Extremely rigid chuck due to integrated flat 11-zone vacuum clamping device with high-precision tip/tilt adjustment using sophisticated pressure membrane technology.
- Minimization of disturbance forces emanating from the energy chain due to novel drag chain concept.
- Ironless drives and high-precision scales (Heidenhain LIP6 G0).
- The machine bed is made of granite. The axes can be customized according to the customer’s requirements.
Applications: High-precision positioning, scanning, exposure, laser engraving, laser processes in general.
Key Features
- Y/X Stage with Vakuum Chuck
- Ultra High Speed
- Impulse Decoupled X Stage
- Short Move and Settle Time
- Repeatability in nm Range
- Reduced Weight due to Carbon Components
Download EZ-0730 Datasheet