Thorlabs offers stage micrometers and concentric square patterns for calibrating distances in an imaging system. These targets feature soda lime glass substrates with vacuum-sputtered, low-reflectivity chrome. Each pattern is manufactured using photolithography, allowing for edge features to be resolved down to approximately 1 µm.
Features
- Horizontal Stage Micrometers with Divisions from 10 µm to 100 µm (3" x 1" or 1" x 1")
- Combined Resolution and Distortion Test Target with Stage Micrometers (3" x 1")
- Positive Concentric Squares Test Targets (1" x 1" or 3" x 3")

Thorlabs offers stage micrometers and concentric square patterns for calibrating distances in an imaging system. These targets feature soda lime glass substrates with vacuum-sputtered, low-reflectivity chrome. Each pattern is manufactured using photolithography, allowing for edge features to be resolved down to approximately 1 µm.

Concentric Squares Test Targets, 1" x 1" or 3" x 3"
- Concentric Squares Test Targets Available in Two Sizes
- 1" x 1" (25.4 mm x 25.4 mm)
- 3" x 3" (76.2 mm x 76.2 mm)
- Calibrate a Measurement for Imaging Software
- Low-Reflectivity, Vacuum-Sputtered Chrome
The R1L1S9P and R3L3S3P Concentric Squares Targets feature twenty-three (Item # R1L1S9P) or fourteen (Item # R3L3S3P) concentric squares with lengths and widths ranging from 0.05 to 20 mm (Item # R1L1S9P) or 0.1 mm to 50 mm (Item # R3L3S3P). A full list of the concentric square sizes are shown in Tables 443C and 443D. Each square is labeled with its width on the target. These targets are made from a soda lime glass substrate with low-reflectivity, vacuum-sputtered chrome. These positive targets are useful for the calibration of distances within imaging systems.

Figure: Close Up of R1L3S5P Stage Micrometer
Combined Resolution and Distortion Test Target, 3" x 1"
- 3.00" x 1.00" x 0.06" (76.2 mm x 25.4 mm x 1.5 mm) Target
- Includes NBS 1963A Pattern, Sector Star, Concentric Circles, Grids, Ronchi Rulings, and More (See Table 444B)
- Determine Resolution of an Optical System
- Measure Image Distortion, Astigmatism, and Other Aberrations
- Compatible with Thorlabs MLS203 Microscope Stages via MLS203P2 Slide Holder
The R1L3S5P positive 3.00" x 1.00" x 0.06" (76.2 mm x 25.4 mm x 1.5 mm) combined resolution / distortion test targets that are made by vacuum-sputtering low-reflectivity chrome with an optical density of ≥3 at 430 nm on a soda lime glass substrate. They are ideal for calibration of imaging systems and microscope stages. They are sized to fit in our MLS203P2 stage slide holder for use with Thorlabs MLS203 microscope stages.
The test targets include an NBS 1963A pattern, a sector (Siemens) star, concentric circles, grids, Ronchi rulings, and more. These targets are useful for testing resolution, field distortion, focus errors, and astigmatism. The NBS 1963A, sector star, and concentric circle targets are useful for measuring imaging resolution. The grids can be used to measure the distortion introduced by an imaging system. The Ronchi rulings are excellent for evaluating resolution, field distortion, and parfocal stability.

Stage Micrometers, 3" x 1" or 1" x 1"
- Scales Centered on either a 3" x 1" (76.2 mm x 25.4 mm) or 1" x 1" (25.4 mm x 25.4 mm) Microscope Slide
- R1L3S2P: 1 mm Scale with 10 µm Divisions
- R1L3S1P: 10 mm Scale with 50 µm Divisions
- R1L1S5P: 20 mm Scale with 100 µm Divisions and Crosshair
- For Calibrating Eyepiece Reticles or Objective Magnification
These targets each feature a horizontal stage micrometer pattern. The R1L3S2P has a 1 mm long scale with 10 µm divisions and numerical labeling every 0.1 mm, the R1L3S1P micrometer has a 10 mm long scale with 50 µm divisions and numerical labeling every 1 mm, and the R1L1S5P micrometer has a 20 mm long scale with 100 µm divisions and numerical labeling every 1 mm, as well as a perpendicular crosshair, as shown in Figure 345D. Each target consists of a soda lime substrate with low-reflectivity, vacuum-sputtered chrome. These positive targets are useful for the calibration of distances within imaging
Mounting
These stage micrometers can be mounted in many of our microscope slide holders. We also offer a variety of general fixed slide holders, microscope slide holders, and translation stages for microscopy.