Thickness is a typical parameter related to length, measurements of which are conducted in various industrial fields, such as the automotive, aviation, ship-building, semiconductor, and display industries.
Among various measurement techniques, optical interferometry is by far one of the most attractive ones for its reliability owing to the direct realization of the meter. Moreover, the nature of this non-contact method of optical interferometry does not damage samples. Xper-IP Mini is the outcome of such interferometric methods realized for measuring thicknesses of thick transparent layers.
What Xper-IP Mini can do for you
- Thickness measurement of transparent materials
Product design
- Xper-IP Mini comes in a rugged and compact design that is suitable for laboratory and manufacturing environments.
- The product dimension is 144.5 mm (W) x 90 mm (D) x 37 mm (H).
- Xper-IP Mini consists of three main components
Performance focused Xper-IP features
- Absolute thickness measurement with accuracy of ±0.2 % in full scale
- Exceptional long-term measurement repeatability of ±0.003 % in full scale
- Broad measurement range of 0.03 mm to 1.2 mm
- Simultaneous multiple layer measuring capability
Specifications and components
Specifications
Resolution (Z) : 10 nm
Accuracy (Z) : ±0.2 % in full scale
Standoff distance : up to 150 mm from objective
Measurement range (Z) : 0.03 mm ~ 1.2 mm
Measurement speed : 100 Hz
Product components
Laser source : 840 nm SLD (SLD controller included)
Spectrometer
Grating : 1200 lpmm transmission grating (spectral range / grating rotation : 810 ~ 910 nm)
Thickness measurement sensor head
Absolute thickness measurement with accuracy of ±0.2 % in full scale
Download datasheet here.
Features
- Absolute thickness measurement with accuracy of ±0.2 % full range
- Exceptional long-term measurement repeatability of ±0.003 % full range
- Broad measurement range of 1.2 mm to 0.03 mm
- Intuitive software with both-surface analysis capacity
- Simultaneous multiple layer measuring capability
Components
- Spectrometer
- Laser module
- Measurement module
- Software
Applications
- Semiconductors
- Flat panel displays
- Optical films
- Medical polymer materials