As part of a scientific publication entitled "Inverted fireball deposition of carbon films with extremely low surface roughness", thin carbon films were analyzed using Fischer's PICODENTOR® HM500 and BETASCOPE®.

The films were first deposited by our partners using the so-called "inverted fireball deposition". The beta backscattering method was then used to determine the layer thickness to 263 nm and verified by means of nanoindentation. Determining the mechanical properties (Young's modulus as well as Vickers and Martens hardness) of such thin films is challenging. In our case, only indentation depths of about 26 nm are allowed to exclude the influence of the substrate.

The publication was supported by our application experts Wladislaw Feuchtenberger and Dr. Konstantinos Panos of Helmut Fischer GmbH and was developed in collaboration with 4A-PLASMA and Gruenwald Laboratories GmbH.

You will find the publication in the Carbon Letter of SpringerNature:

https://doi.org/10.1007/s42823-022-00424-9  

(retrieval of the full text may be subject to a fee)

Metrology