Alio Industries Vertical Motion Systems

Z-Lift and Vertical Axis Motion Systems

piezo motor

ALIO Industries’ Z-Lift motion platforms were created to replace the inaccuracies of the ever present Z-Wedge vertical stages as well as reduce the footprint and improve performance of linear stages mounted in the vertical orientation. Every component in a motion stage adds to the total error. Since Z-wedges have a minimum of three machined components with complex angles, three sets of bearings, a motor via a coupling and an encoder, the result is a very inaccurate stage.

ALIO answers this with a family of very high accuracy, high repeatable vertical stages.

For descriptions of systems available, please read on below.

For specifications and datasheets for download, please click here.

NANO Z

nano z

Increased demands for True NANO ™ metrology and process lead ALIO to design and manufacture the NANO Z™ patent pending Z lift air bearing stage to exceed all past design issues of tip and tilt while increasing the accuracy to less than 100 nanometers with standard Renishaw Invar encoders. The counterbalanced NANO Z™ can easily hold heavy vacuum wafer chucks and still excel with nano-precision over 24 mm of travel.

Mechanical Bearing Z Stage

mechanical bearing

The advantage of this family of vertical Z-lift stages:

  • Linear or voice coil motors
  • High rigidity crossed roller bearings
  • High force motors
  • Linear encoders
  • Air counter balanced
  • Motor, bearings, encoder and counterbalance all on approximate centerline of the stage
  • Payload can mount directly to the face or top surface of the stage to eliminate the weakness and resonant frequency issues associated with additional brackets
  • Excellent dynamic performance

Compact Voice Coil Z Stage

compact voice coil

The advantage of this family of vertical Z-lift stages:

  • Compact design, low profile height
  • Voice coil motors
  • High rigidity crossed roller bearings
  • Linear encoders
  • Air counter balanced
  • Motor, bearings, encoder and counterbalance all on approximate centerline of the stage.
  • Payload can mount directly to the face or top surface of the stage to eliminate the weakness and resonant frequency issues associated with additional brackets
  • 4X to 10X more precise than Z-wedge stages.

Piezo Motor Z Stages

piezo motor

The advantage of this family of vertical Z-lift stages:

  • Compact design, low profile height
  • Ceramic servo motors
  • High rigidity crossed roller bearings
  • Linear encoders
  • Counter balanced
  • Motor, bearings, encoder and counterbalance all on approximate centerline of the stage.
  • Payload can mount directly to the face or top surface of the stage to eliminate the weakness and resonant frequency issues associated with additional brackets
  • 4X to 10X more precise than Z-wedge stages.

Linear Motor Counter Balanced Z Stage

linear motion counter zstage

The advantage of this family of vertical linear stages:

  • ALIO’s nano-precision design
  • Linear servo motors
  • High rigidity crossed roller bearings
  • Linear encoders
  • Counter balanced with dual frictionless cylinders balancing the load. The cylinders are in-line with the motor, bearings and encoder thus they do not create an Abbé error
  • Motor, bearings, encoder and counterbalance all on approximate centerline of the stage.

Air Bearing Linear Motor Z Stages

air bearing linear

The advantage of this family of vertical linear stages:

  • Granite base to ensure exceptional flatness and straightness
  • Linear servo motors
  • High rigidity, nano-precision air bearings
  • Linear encoders
  • Counter balanced with dual frictionless cylinders balancing the load. The cylinders are in-line with the motor, bearings and encoder thus they do not create an Abbé error
  • Counterbalance brackets can be changed if required to assure counterbalance force is transferred through the mass center of the load.
  • Motor, bearings, encoder and counterbalance all on approximate centerline of the stage.

Vertical Mount XY Stage System

vertical mount xystage

The advantage of this family of vertical linear stages:

  • Available with linear or ceramic servo motors
  • High rigidity crossed roller bearings
  • Linear encoders
  • Counter balanced with single or dual frictionless cylinders balancing the load.

Constant Force Spring Counterbalance

constant force spring

The advantage of this family of vertical linear stages:

  • Vacuum Compatible
  • Counterbalance force configurable for customer specific load
  • Long travel capable
  • High rigidity crossed roller bearings
  • Linear encoders
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