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piezosystem jena extends objective positioner series MIPOS with two new industry products

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MIPOS 140 OEM Microscope Positioner

Typically objective positioners are firmly mounted directly onto a microscope. Piezosystem jena has now introduced two new systems which can be screwed on a machine or rail.

MIPOS 140:

Most installed lens positioners require an undesired extension to the optical axis. The distance between the lens and the sample is shortened. This can lead to collisions between the optics and the examined sample. Built with a very special design principle, the optical axis stays the same with the MIPOS 140. The position of the optical system remains unchanged after the installation and the focal point continues to be at the desired adjusted position. The MIPOS 140 OEM offers high-precision positioning accuracy for lenses with weights of up to 500 g. With an open loop travel range of 140 microns and 100 microns in closed loop operation, the MIPOS 140 reaches a resolution in the sub-nanometer range. The MIPOS can also be equipped with strain gauge, capacitive or alternative sensors for determining the position and correct for creep and hysteresis. The MIPOS 140 OEM also can be mounted upright in any position, for wafer inspection machines or used in optical benches horizontally and laser systems.

MIPOS 250 SG:

The objective positioner MIPOS 250 SG has a travel range of 250 microns in open loop operation and 200 microns in closed loop. With an extremely flat design the positioner has been constructed to be screwed to a flat surface. This surface can be an optical bench or a track within a machine. The high parallelism of the surface makes this MIPOS ideal for use in test and measurement, as well as in the semiconductor industry, such as mask inspection. Adapters are available for all standard microscope threads (Zeiss, Leica, Olympus, Nikon, Mitutoyo), thus making the MIPOS 250 universally applicable. The proven parallelogram principle guarantees a parallel motion without mechanical play and no affect on the optical axis. Fine focusing is also possible with high-resolution lenses, while drift and hysteresis are minimized when equipped with a strain gauge sensor in the MIPOS system.

Applications:

  • Mask Inspection
  • Metrology and Test Engineering
  • Industrial Metrology
  • Optics
  • Semiconductor Industry
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