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piezosystem jena: Piezo Micrometer Screw Drive

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Hybrid element that combines the advantages of long travel of micrometer screws, with the nm-accuracy of a piezo stage

These model MICI Piezo Micrometer Screw Drive elements from piezosystem jena were originally developed for quality control applications in the optics industry. They consist of a piezoelectric actuator in combination with a micrometer screw drive. The user can first adjust the coarse position of the actuator with a micrometer screw, and then fine tune it with the piezo stage itself. This improves the accuracy and reproducibility of the linear stage significantly.

Long travels up to tens of mm, depending on the used micrometer screw and sub-nm resolution can be reached while simultaneously moving high loads up to 20 kg with the MICI 80. This is due to its very robust construction.

So these piezo stages are perfectly suited for high precision adjustment of linear positioners. Based on its sophisticated solid state flexure hinge technology the MICI seriesoffers motion without mechanical play. Also these stages can be driven at high frequencies.

The MICI fits in applications like improvement of resolution of linear stages, quality control, automation, fine adjustment of optical components and micro-assembly. You have a choice of 4 models compatible with the micrometer drives of Mitutoyo, Newport or Qioptic.

Micrometer screw drive MICI 80 / 180 / 200 and MICI 140

Characteristics:

  • motion up to 250µm
  • high resonant frequency
  • high precision adjustment of linear positioner
  • motion without mechanical play 
  • precise adjustment of heavy loads
  • MICI 180 compatible with series SM13 micrometer
  • drives from "NEWPORT"
  • MICI 80 and 200 are compatible with series 152 micrometer drives from "Mitutoyo"
  • MICI 140 compatible with series G micrometer drives from "Qioptiq Photonics"

Applications:

  • improvement of resolution of linear stages
  • quality control
  • automation
  • fine adjustment of optical components
  • microassembly

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These elements were originally developed for quality control in the optical industry and they consist of a piezoelectrical actuator in combination with a micrometer screw drive.

The user can first adjust the position of the actuator, and then fine tune this position with the aid of the piezostage. The resolution is in the nm and sub-nm range.

Because of the very robust construction of the element, high load masses can be lifted.

The customer has a choice between different models, with different travel ranges and load capabilities.

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