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Nanonics triple beam AFM SEM FIB system is one of the ten best microscopy innovations in 2013

Nanonics

The award winning Nanonics3TB4000, an integrated
AFM/SEM/FIB system

Nanonics is  proud to announce that their triple beam integrated AFM/SEM/FIB system, the Nanonics 3TB4000, was judged one of the ten best microscopy innovations in 2013 and is the recipient of the prestigious 2013 Microscopy Today Innovation Award. The 3TB4000 provides the ultimate 3D nanoscale characterization capability through a revolutionary innovation of open architecture that provides open access to the SEM/FIB beams without any obstruction or interference to the injectors, detectors, or beam lines.

 

With the 3TB4000, the SEM,FIB, and AFM can now be used to provide complimentary information in order to provide a complete characterization of material by taking advantage of the functional and high resolution 3D capabilities of AFM, the large field of view and rapid scanning of the SEM, and the fabrication / material removal capability of the FIB. Applications demonstrating this powerful new capability have been shown in diverse areas including side wall imaging in semiconductors, locating and measuring optical properties of individual metal oxide nanowires or mechanical properties of surface features, and assessing AFM probes in situ while imaging.

3TB4000 - Combined AFM SEM FIB 

The 3TB4000 is an award-winning SPM/NSOM system seamlessly integrated with SEM/FIB.  This instrument is based on a revolutionary design that provides open access to the SEM/FIB beams for complete integration of SPM, SEM and FIB. The SPM probe does not obscure the electronic or ion beam axis and also sits at the eucentric point, enabling the SPM to rotate into position while either the electron or ion beam is in operation. 

AFM SEM FIB Integration Protocols

Nanonics AFM integration with SEM and FIB offers unique protocols and applications:

  • Simultaneous imaging of surfaces with SEM/SPM
  • True 3-D functional imaging by taking advantage of ion beam milling
  • Excellent x,y resolution of SEM coupled with ultimate Z resolution in SPM       
  • Large field of view screening with SEM, followed by high resolution SPM imaging
  • Functional nanoscale imaging taking advantage of SPM/NSOM imaging (e.g. cathodoluminescence, electrical, force)
  • Innovative probe design that does not interfere with electron axis
  • Multiprobe SPM Imaging and manipulation
  • Unique AFM capabilities of Deep Trench Profiling and Side Wall ImagingSuper-resolution optical imaging inside SEM/FIM such as cathodoluminescence
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